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Exitech ASX-125 Laser Annealing System

Productnumber: S43-1096686

Exitech ASX-125 Laser Annealing System with Lambda Physik LPX315i Eximer laser. For annealing of TFT-parts under High Vacuum, consisting of
UHV-Chamber, 2 turbomolecular vacuum pumps,double PC-control, Lamba Physik LPX 315i Excimer laser with gas processing, Quartz window with test certificate, full documentation, sluice for parts up to 120x150mm. Wavelength 308 nm, max pulse rate 150 Hz, max. pulse energy 500 mJ. MicroLas beam homogenizer and attenuator. Beam size 0 – 0,5 mm, energy density up to 600 mJ/cm², size of specimen up to 120 x 150 mm. Manufactured 1997, only used for test production by Philips Eindhoven, very good condition.Manual with 107 pages as
pdf. file available.Price ex warehouse



Price: 28.000,00 €

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